The penetration limit of poly(4-vinyl phenol) thin films for etching via holes by inkjet printing

摘要

This paper reports the penetration limit of via holes through dissolving dielectric polymer thin films by inkjet printing. It was found that both the outer diameter of via holes and the polymer thickness affect the penetration depth from the experimental results. Based on this finding, a more accurate relationship between the inner diameter of via holes and the diameter of in-flight droplets for different polymer thicknesses is obtained.