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Prediction of the propagation probability of individual cracks in brittle single crystal materials

机译:脆性单晶材料中单个裂纹扩展的可能性预测

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摘要

We show that x-ray diffraction imaging (topography) and finite-element modelling can determine accurately the probability of propagation of individual cracks in brittle single crystal materials. The x-ray image of the crack provides a critical parameter for crack propagation which informs a predictive model, enabling us to identify critical defects that lead to catastrophic shattering of silicon wafers during high temperature thermal processing. Wafers fracture on cooling and finite element modelling shows that, during cooling, the tangential stress at the wafer edge is tensile and results in crack propagation. The predicted fracture geometry agrees extremely well with that observed experimentally.
机译:我们表明,x射线衍射成像(形貌)和有限元建模可以准确确定脆性单晶材料中单个裂纹的传播概率。裂纹的X射线图像为裂纹扩展提供了关键参数,从而为预测模型提供了依据,使我们能够识别出导致高温热处理过程中硅片发生灾难性破碎的关键缺陷。冷却过程中的晶圆断裂和有限元建模表明,在冷却过程中,晶圆边缘的切向应力是拉伸应力,并导致裂纹扩展。预测的断裂几何形状与实验观察到的非常吻合。

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  • 来源
    《Applied Physics Letters》 |2012年第4期|p.041903.1-041903.4|共4页
  • 作者单位

    Department of Physics, Durham University, South Road, Durham DH1 3LE, United Kingdom;

    Department of Physics, Durham University, South Road, Durham DH1 3LE, United Kingdom;

    CEIT and Tecnun (University of Navarra), Paseo de Manuel Lardizabal 15,20018 San Sebastian, Spain;

    CEIT and Tecnun (University of Navarra), Paseo de Manuel Lardizabal 15,20018 San Sebastian, Spain;

    Dublin City University, School of Electronic Engineering, Dublin 9, Ireland;

    Dublin City University, School of Electronic Engineering, Dublin 9, Ireland;

    Jordan Valley Semiconductors UK Ltd., Durham DH1 1TW, United Kingdom;

    University of Freiburg, Kristallographie, Institut fuer Geowissenschaften, Freiburg, Germany,Carl Zeiss Microlmaging GmbH, 37081 G6ttingen, Germany;

    University of Freiburg, Kristallographie, Institut fuer Geowissenschaften, Freiburg, Germany;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
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