Fabrication and optical properties of non-polar Ill-nitride air-gap distributed Bragg reflector microcavities

摘要

Using the thermal decomposition technique, non-polar Ill-nitride air-gap distributed Bragg reflector (DBR) microcavities (MCs) with a single quantum well have been fabricated. Atomic force microscopy reveals a locally smooth DBR surface, and room-temperature micro-photoluminescence measurements show cavity modes. There are two modes per cavity due to optical birefringence in the non-polar MCs, and a systematic cavity mode shift with cavity thickness was also observed. Although the structures consist of only 3 periods (top) and 4 periods (bottom), a quality factor of 1600 (very close to the theoretical value of 2100) reveals the high quality of the air-gap DBR MCs.