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Superlattice-like Sb_(50)Se_(50)/Ga_(30)Sb_(70) thin films for high-speed and high density phase change memory application

机译：超晶格状Sb_（50）Se_（50）/ Ga_（30）Sb_（70）薄膜，用于高速和高密度相变存储应用

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摘要

Multi-level phase change character of superlattice-like (SLL) Sb_(50)Se_(50)/Ga_(30)Sb_(70) thin films was investigated through in-situ film resistance measurement. SLL structure of the thin films was confirmed by using transmission electron microscopy. Three resistance states were observed during heating process, and their thermal stability was also examined. A picosecond laser pump-probe system was used to measure phase-change time of the SLL Sb_(50)Se_(50)/Ga_(30)Sb_(70) thin films. Phase change memory cells based on the SLL [SS(5nm)/GS(10nm)]_3 thin films were fabricated to test and verify multi-level switch between set and reset states.
机译：通过原位膜电阻测量研究了超晶格状（SLL）Sb_（50）Se_（50）/ Ga_（30）Sb_（70）薄膜的多级相变特性。通过使用透射电子显微镜确认了薄膜的SLL结构。在加热过程中观察到三个电阻状态，并且还检查了它们的热稳定性。皮秒激光泵浦探针系统用于测量SLL Sb_（50）Se_（50）/ Ga_（30）Sb_（70）薄膜的相变时间。制造了基于SLL [SS（5nm）/ GS（10nm）] _ 3薄膜的相变存储单元，以测试和验证置位和复位状态之间的多级切换。

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  • 来源
    《Applied Physics Letters》 |2013年第15期|152107.1-152107.4|共4页
  • 作者

    Yifeng Hu; Xiaoyi Feng; Simian Li; Tianshu Lai; Sannian Song; Zhitang Song; Jiwei Zhai;

  • 作者单位

    Functional Materials Research Laboratory, Tongji University, Shanghai 200092, China,School of Mathematics and Physics, Jiangsu University of Technology, Changzhou 213001, China;

    Functional Materials Research Laboratory, Tongji University, Shanghai 200092, China;

    State Key Laboratory of Optoelectronic Materials and Technology, Department of Physics,Sun Yat-Sen University, Guangzhou 510275, China;

    State Key Laboratory of Optoelectronic Materials and Technology, Department of Physics,Sun Yat-Sen University, Guangzhou 510275, China;

    State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Micro-System and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China;

    State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Micro-System and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China;

    Functional Materials Research Laboratory, Tongji University, Shanghai 200092, China;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
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  • 正文语种 eng
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  • 入库时间 2022-08-18 03:16:42

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