Wafer bonded distributed feedback laser with sidewall modulated Bragg gratings

摘要

We demonstrate an optically pumped hybrid Ⅲ-Ⅴ/Si distributed feedback laser with a small footprint, using sidewall modulated Bragg gratings for optical feedback. Our approach provides high overlap between lasing mode and gain medium and may enable hybrid lasers with improved efficiency, reduced threshold, and minimal size. We fabricate the structure using plasma-assisted wafer bonding, followed by self-aligned lithography and etching. The latter allows us to avoid alignment errors. This approach is a promising avenue toward ultracompact, energy efficient, and scalable monolithically integrated photonic circuits.