The structure measurement of micro-electro-mechanical system devices by the optical feedback tomography technology

摘要

We describe a potential way to obtain the images of the surface and internal structure of micro-electro-mechanical system devices by optical feedback tomography technology. By using different materials and various structures of micro devices as the samples, this approach is proved to be able to measure the geometric structure of the micro device, including the internal structure, which makes it possible to detect whether the micro-device tested meets its fabrication requirements.