机译:集成在开口环共振器微等离子体源中的组合式压力和流量传感器
Angstroem Space Technology Center, Department of Engineering Sciences, Uppsala University, Box 534, 751 21 Uppsala, Sweden,Division of Microsystems Technology, Department of Engineering Sciences, Uppsala University, Box 534, 751 21 Uppsala, Sweden;
Angstroem Space Technology Center, Department of Engineering Sciences, Uppsala University, Box 534, 751 21 Uppsala, Sweden,Division of Microsystems Technology, Department of Engineering Sciences, Uppsala University, Box 534, 751 21 Uppsala, Sweden;
Angstroem Space Technology Center, Department of Engineering Sciences, Uppsala University, Box 534, 751 21 Uppsala, Sweden,Division of Microsystems Technology, Department of Engineering Sciences, Uppsala University, Box 534, 751 21 Uppsala, Sweden;
机译:小型化的硅贯通基板开环谐振腔等离子体源的工作特性和光发射分布
机译:基于带状线裂环谐振器的微等离子体源评估
机译:基于平行带状线谐振器的大气压微等离子体源
机译:关于低压范围的改进,通过结合CMOS和MEMS技术制造的集成压力传感器系统
机译:可切换微波电磁带隙和开环谐振器结构的设计和表征。
机译:具有在大气压下工作的集成谐振器的微机械压力传感器
机译:集成在开口环共振器微等离子体源中的组合式压力和流量传感器