机译:微机械硅盘谐振器中的相互3:1次谐波同步
Department of Mechanical and Aerospace Engineering, University of California, Davis, California 95616, USA;
Department of Civil and Environmental Engineering, Politecnico di Milano, 20133 Milano, Italy;
Department of Mechanical and Aerospace Engineering, University of California, Davis, California 95616, USA;
Department of Civil and Environmental Engineering, Politecnico di Milano, 20133 Milano, Italy;
Department of Mechanical and Aerospace Engineering, University of California, Davis, California 95616, USA;
机译:压电锆钛酸盐钛酸酯薄膜诱导的微机械硅盘谐振器
机译:圆形微加工多晶硅圆盘的参数激励
机译:飞秒激光微加工在氟化钙中制造三维微盘谐振器
机译:圆形微加工多晶硅圆盘上回音壁模式的参数激励
机译:通过对基板和系链进行修改,微机械加工的薄膜硅上压电薄膜横向延伸谐振器的性能得到提高。
机译:推挽驱动磁盘谐振器陀螺仪中参数和次谐波激励分析
机译:互相硅盘谐振器中的相互3:1子发声同步