Resonant and resistive dual-mode uncooled infrared detectors toward expanded dynamic range and high linearity

摘要

This paper reports an uncooled infrared (IR) detector based on a micromachined piezoelectric resonator operating in resonant and resistive dual-modes. The two sensing modes achieved IR responsivities of 2.5 HzW and 900 µdBW, respectively. Compared with the single mode operation, the dual-mode measurement improves the limit of detection by two orders of magnitude and meanwhile maintains high linearity and responsivity in a higher IR intensity range. A combination of the two sensing modes compensates for its own shortcomings and provides a much larger dynamic range, and thus, a wider application field of the proposed detector is realized.