机译:真空过程中颗粒喷涂PZT厚膜的31模式压电微加工超声换能器
Department of Robotics Engineering, DGIST, 50-1 Sang-ri, Hyeongpung-myeon, Dalseong-gun, Daegu 42988, South Korea,DGIST-ETH Microrobot Research Center, DGIST, 50-1 Sang-ri, Hyeonpung-myeon, Dalseong-gun, Daegu 42988, South Korea;
Funtional Ceramics Group, Korea Institute of Material Science, 797 Changwondaero, Seongsangu, Changwon 51508, South Korea;
Funtional Ceramics Group, Korea Institute of Material Science, 797 Changwondaero, Seongsangu, Changwon 51508, South Korea;
Department of Mechanical Engineering, Massachusetts Institute of Technology, 77 Massachusetts Avenue, Cambridge, Massachusetts 02139, USA;
Department of Robotics Engineering, DGIST, 50-1 Sang-ri, Hyeongpung-myeon, Dalseong-gun, Daegu 42988, South Korea,DGIST-ETH Microrobot Research Center, DGIST, 50-1 Sang-ri, Hyeonpung-myeon, Dalseong-gun, Daegu 42988, South Korea;
Department of Robotics Engineering, DGIST, 50-1 Sang-ri, Hyeongpung-myeon, Dalseong-gun, Daegu 42988, South Korea,DGIST-ETH Microrobot Research Center, DGIST, 50-1 Sang-ri, Hyeonpung-myeon, Dalseong-gun, Daegu 42988, South Korea;
Funtional Ceramics Group, Korea Institute of Material Science, 797 Changwondaero, Seongsangu, Changwon 51508, South Korea;
Department of Robotics Engineering, DGIST, 50-1 Sang-ri, Hyeongpung-myeon, Dalseong-gun, Daegu 42988, South Korea,DGIST-ETH Microrobot Research Center, DGIST, 50-1 Sang-ri, Hyeonpung-myeon, Dalseong-gun, Daegu 42988, South Korea;
机译:具有厚PZT溶胶凝胶膜的压电微机械超声换能器
机译:具有厚PZT溶胶凝胶膜的压电微机械超声换能器
机译:厚复合PZT薄膜压电微机械超声换能器的制备与表征
机译:基于压电微加工超声换能器的新型PZT薄膜的设计与制作
机译:具有压电氮化铝薄膜的微加工超声换能器。
机译:压电微机械超声换能器上硅基PZT纤维外延薄膜的制备与表征
机译:带厚PZT溶胶凝胶膜的压电微机械超声波换能器