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A precise and wide-dynamic-range displacement-measuring homodyne quadrature laser interferometer

机译:精密,宽动态范围的位移测量零差正交激光干涉仪

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摘要

We present a fast, displacement-measuring, single-pass, two-detector homodyne quadrature laser interferometer and compare its performance with an arm-compensated, proportional, integral-derivative-controlled Michelson interferometer. Special attention is given to the extension of the dynamic range. The wide dynamic range is achieved by an accurate fringe subdivision based on an enhanced ellipse-specific fitting of the scattered Lissajous curve and by increasing the total displacement using the quadrature-detection technique. The common periodic deviations, i.e., the unequal AC amplitudes, the DC offsets, and the lack of quadrature are determined and reduced by data processing based on an ellipse-specific, least-squares fitting to obtain nanometric accuracy. The performance of the described interferometer is demonstrated through the measurement of high-amplitude and high-frequency laser-induced ultrasound.
机译:我们提出了一种快速,位移测量,单通,两探测器的零差正交激光干涉仪,并将其性能与臂补偿,比例,积分微分控制的迈克尔逊干涉仪进行了比较。特别注意动态范围的扩展。宽的动态范围是通过基于离散的Lissajous曲线的增强的椭圆特定拟合和通过使用正交检测技术增加总位移的精确条纹细分来实现的。通过基于椭圆的最小二乘拟合进行数据处理,可以确定并减少常见的周期偏差,即不相等的AC振幅,DC偏移和正交误差,从而获得纳米精度。所述干涉仪的性能通过高振幅和高频激光诱导的超声的测量来证明。

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