Ultrasonic mist chemical vapor deposition and dielectric properties of cubic pyrochlore bismuth magnesium niobate thin films

摘要

Ultrasonic mist chemical vapor deposition (mist-CVD) process has been used to deposit bismuth-based cubic pyrochlore thin films for the first time. The crystal structure, morphology, and dielectric properties of Bi1.5MgNb1.5O7 (BMN) films grown in N-2, air, and O-2 carrier gas are characterized. Sufficient O-2 is beneficial for the pure phase and highly crystallized cubic pyrochlore BMN thin films with a (2 2 2)-preferred orientation. Superior dielectric properties (dielectric constant 176, loss tangent 0.005, and tunability 29%@ similar to 1 MV cm(-1)) at 1 MHz are obtained. The results suggest that the mist-CVD method have potential in depositing high quality bismuth-based cubic pyrochlore thin films. (C) 2019 The Japan Society of Applied Physics