Transmission Electron Microscopy Observation on the Eariy Stages of Sn-Doped In_2O_3 Film Growth Deposited on Amorphous Carbon Films by DC Magnetron Sputtering

摘要

Early stages of film growth for Sn-doped In_2O_3 (ITO) deposited on amorphous carbon (a-C) films by dc magnetron sputtering were investigated by transmission electron microscopy (TEM). ITO islands appeared as dark regions in the TEM images, and their density and size increased with increasing deposition time. Furthermore, electron diffraction analyses revealed that the intensity of the ring pattern for In_2O_3(222) gradually increased with increasing deposition time. This indicated that crystallized ITO islands were formed on the a-C surface in the early stages of the film growth.