Improved optical profiling using the spectral phase in spectrally resolved white-light interferometry

摘要

In spectrally resolved white-light interferometry (SRWLI), the white-light interferogram is decomposed into its monochromatic constituent. The phase of the monochromatic constituents can be determined using a phase-shifting technique over a range of wavelengths. These phase values have fringe order ambiguity. However, the variation of the phase with respect to the wavenumber is linear and its slope gives the absolute value of the optical-path difference. Since the path difference is related to the height of the test object at a point, a line profile can be determined without ambiguity. The slope value, though less precise helps us determine the fringe order. The fringe order combined with the monochromatic phase value gives the absolute profile, which has the precision of phase-shifting interferometry. The presence of noise in the phase may lead to the misidentification of fringe order, which in turn gives unnecessary jumps in the precise profile. The experimental details of measurement on standard samples with SRWLI are discussed in this paper.