Optimization of deposition uniformity for large-aperture National Ignition Facility substrates in a planetary rotation system

摘要

Multilayer coatings on large substrates with increasingly complex spectral requirements are essential for a number of optical systems, placing stringent requirements on the error tolerances of individual layers. Each layer must be deposited quite uniformly over the entire substrate surface since any nonuniformity will add to the layer-thickness error level achieved. A deposition system containing a planetary rotation system with stationary uniformity masking is modeled, with refinements of the planetary gearing, source placement, and uniformity mask shape being utilized to achieve an optimal configuration. The impact of improper planetary gearing is demonstrated theoretically, as well as experimentally, providing more comprehensive requirements than simply avoiding repetition of previous paths through the vapor plume, until all possible combinations of gear teeth have been used. Deposition efficiency and the impact of changing vapor plume conditions on the uniformity achieved are used to validate improved source placement. Uniformity measurements performed on a mapping laser photometer demonstrate nonuniformities of less than 0.5percent for 0.75 m optics in a 72 in. (1.8 m) coating chamber.