Optimization of Thickness Uniformity Distribution on a Large-aperture Concave Reflective Mirror and Shadow Mask Design in a Planetary Rotation System

摘要

Improving the spatial resolution of remote sensing satellites has long been a challenge in the field of optical designing. Although the use of large-aperture reflective mirrors significantly improves the resolution of optical systems, controlling the film thickness uniformity remains an issue. The planetary rotation system (PRS) has received significant attention owing to the excellent uniformity of the coating applied to the large-aperture reflective mirror. However, the development of the PRS remains hindered by a lack of research on its properties and the design method of the shadow mask. To address this, we performed a theoretical analysis of the distribution of film thickness and uniformity in the PRS, which is impacted by parameters of geometric configuration in the vacuum chamber. We present a film thickness expression based on Knudsen’s law and the geometric configuration of the vacuum chamber that incorporates an additional shading function. Moreover, the variation of uniformity in the standard and counter PRSs was elucidated by changing the location of the evaporation source. Finally, a fixed-position shadow mask, which was obtained by theoretical design, allows the nonuniformity of the concave reflective mirror (with a 700 mm aperture) to reduce from 2.43% to 0.7%, highlighting the importance of initial shape design.