Fabry-Perot diaphragm fiber-optic sensor

摘要

The general theory of a diaphragm fiber-optic sensor (DFOS) is proposed. We use a critical test to determine if a DFOS is based on Fabry-Perot interference or intensity modulation. By use of the critical test, this is the first design, to the best of our knowledge, of a purely Fabry—Perot DFOS, fabricated with microelectromechanical system technology, and characterized as an audible microphone and ultrasonic hydrophone with orders of improvement in signal-to-noise ratio.