Nanostructuring of laser-deposited to films by self-limited oxidation

摘要

Local laser-induced oxidation of thin titanium films on glass is shown to be self-limiting due to a decrease in the absorp- tivity during the reaction. Taking advantage of this con- finement, stable writing of transparent oxide line structures narrower than the diffraction-limited focused spot of a con- tinuous wave Ar ion laser (500 nm) has been accomplished.