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High-Performance Bottom-Contact Organic Thin-Film Transistors with Controlled Molecule-Crystal/Electrode Interface

机译:具有受控的分子-晶体/电极接口的高性能底部接触有机薄膜晶体管

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摘要

Organic thin-film transistors (OTFTs) are emerging as an inexpensive alternative to amorphous silicon devices because of their many attractive features, such as a simple fabrication process, low cost, and mechanical flexibility. Recently, the performance of OTFTs has been significantly improved by modifying the dielectric surface and/or source and drain (S/D) electrodes, or by using novel dielectric materials. However, high-performance OTFTs were mostly achieved in top-contact (TC) configurations and not in bottom-contact (BC) configurations. As organic active materials are sensitive to chemical wet and ion-beam processes, shadow-mask evaporation is usually used to form S/D electrodes in TC configurations. Such a process, however, is incompatible with large-scale integration and does not allow one to produce a channel length shorter than a few tens of micrometers. It is therefore desirable to use a BC configuration, which is compatible with fine lithography processing, for promising applications such as high-resolution flexible displays.
机译:由于有机薄膜晶体管(OTFT)的许多吸引人的特征,例如简单的制造工艺,低成本和机械柔韧性,它们正在成为非晶硅器件的廉价替代品。最近,通过修改介电表面和/或源极和漏极(S / D)电极,或通过使用新型介电材料,OTFT的性能已得到显着改善。但是,高性能OTFT大多是在顶部接触(TC)配置中实现的,而在底部接触(BC)配置中则无法实现。由于有机活性材料对化学湿法和离子束工艺敏感,因此通常使用荫罩蒸发来形成TC配置的S / D电极。但是,这种方法与大规模集成不兼容,并且不允许产生短于几十微米的沟道长度。因此,期望将与精细光刻处理兼容的BC配置用于诸如高分辨率柔性显示器的有前途的应用。

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