Active Micro-Actuators for Optical Modulation Based on a Planar Sliding Triboelectric Nanogenerator

摘要

With the development of microano electromechanical systems (MEMS/NEMS), local power supplies have become especially important for their applications in human health, infrastructure, environmental aspects, and sensor network monitoring. Because of their disadvantages, such as their unsustainability, environmental pollution, and high resource consumption, batteries cannot meet the growing demands of the MEMS/NEMS technology and sensor network environments. Sustainable and self-powered technology by the scavenging of ambient mechanical energy would be a great solution and future trend. Based on microano processing technology, various energy-harvesting technologies for microano systems have been studied, such as electrostatic, piezoelectric, electromagnetic, and magnetostriction.