Characterization of Shear Horizontal Waves Using a 1D Laser Doppler Vibrometer

摘要

We developed a new technique for the detection of shear horizontal surface acoustic waves (SH-SAW) using a one-dimensional laser-based Doppler vibrometer. It measures the out-of-plane surface deformation at the fingertip of an interdigitated transducer (the boundary of the wave aperture) and uses it to estimate the instantaneous in-plane displacement field given the substrate Poisson ratio. It can also estimate the degree of surface confinement (wave decay rate). The proposed approach was first verified using finite element analysis (FEA) and demonstrated experimentally using a Bleustein–Gulyaev resonator.