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Two-Color Pixel Patterning for High-Resolution Organic Light-Emitting Displays Using Photolithography

机译:用于使用光刻法的高分辨率有机发光显示器的双色像素图案化

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摘要

Nowadays, the display industry is endeavoring to develop technology to provide large-area organic light-emitting diode (OLED) display panels with 8K or higher resolution. Although the selective deposition of organic molecules through shadow masks has proven to be the method of choice for mobile panels, it may not be so when independently defined high-resolution pixels are to be manufactured on a large substrate. This technical challenge motivated us to adopt the well-established photolithographic protocol to the OLED pixel patterning. In this study, we demonstrate the two-color OLED pixels integrated on a single substrate using a negative-tone highly fluorinated photoresist (PR) and fluorous solvents. Preliminary experiments were performed to examine the probable damaging effects of the developing and stripping processes upon a hole-transporting layer (HTL). No significant deterioration in the efficiency of the develop-processed device was observed. Efficiency of the device after lift-off was up to 72% relative to that of the reference device with no significant change in operating voltage. The procedure was repeated to successfully obtain two-color pixel arrays. Furthermore, the patterning of 15 μm green pixels was accomplished. It is expected that photolithography can provide a useful tool for the production of high-resolution large OLED displays in the near future.
机译:如今,显示行业正在努力开发技术,以提供具有8K或更高分辨率的大面积有机发光二极管(OLED)显示面板。尽管通过阴影面罩的选择性沉积有机分子已经被证明是用于移动板的选择方法,但是当在大型基板上制造独立定义的高分辨率像素时,可能不是这样。该技术挑战使我们能够采用良好建立的光刻协议到OLED像素图案。在该研究中,我们使用负色调高度氟化的光致抗蚀剂(PR)和氟溶剂来证明在单个基板上集成的双色OLED像素。进行初步实验以检查在空穴传输层(HTL)上的显影和汽提过程的可能损伤效果。观察到显影处理装置的效率没有显着恶化。相对于参考装置的升高后,剥离后的装置的效率高达72%,没有显着变化的工作电压。重复该过程以成功获得双色像素阵列。此外,完成了15μm绿色像素的图案化。预计光刻可以为在不久的将来生产高分辨率大OLED显示器的有用工具。

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