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Batch-fabricated high-performance graphene Hall elements

机译:批量制造的高性能石墨烯霍尔元件

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摘要

Hall elements are by far the most widely used magnetic sensor. In general, the higher the mobility and the thinner the active region of the semiconductor used, the better the Hall device. While most common magnetic field sensors are Si-based Hall sensors, devices made from III-V compounds tend to favor over that based on Si. However these devices are more expensive and difficult to manufacture than Si, and hard to be integrated with signal-processing circuits for extending function and enforcing performance. In this article we show that graphene is intrinsically an ideal material for Hall elements which may harness the remarkable properties of graphene, i.e. extremely high carrier mobility and atomically thin active body, to create ideal magnetic sensors with high sensitivity, excellent linearity and remarkable thermal stability.
机译:霍尔元件是迄今为止使用最广泛的磁传感器。通常,迁移率越高,所用半导体的有源区越薄,霍尔器件越好。尽管最常见的磁场传感器是基于Si的霍尔传感器,但是由III-V化合物制成的器件倾向于优于基于Si的器件。然而,这些器件比Si更昂贵,制造难度更大,并且难以与信号处理电路集成以扩展功能和增强性能。在本文中,我们证明了石墨烯本质上是霍尔元件的理想材料,可以利用石墨烯的卓越性能(即极高的载流子迁移率和原子薄的活性体)来创建具有高灵敏度,出色的线性度和出色的热稳定性的理想磁传感器。

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