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Speckle lithography for fabricating Gaussian quasi-random 2D structures and black silicon structures

机译:用于制造高斯准随机2D结构和黑硅结构的散斑光刻

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摘要

Laser speckle pattern is a granular structure formed due to random coherent wavelet interference and generally considered as noise in optical systems including photolithography. Contrary to this, in this paper, we use the speckle pattern to generate predictable and controlled Gaussian random structures and quasi-random structures photo-lithographically. The random structures made using this proposed speckle lithography technique are quantified based on speckle statistics, radial distribution function (RDF) and fast Fourier transform (FFT). The control over the speckle size, density and speckle clustering facilitates the successful fabrication of black silicon with different surface structures. The controllability and tunability of randomness makes this technique a robust method for fabricating predictable 2D Gaussian random structures and black silicon structures. These structures can enhance the light trapping significantly in solar cells and hence enable improved energy harvesting. Further, this technique can enable efficient fabrication of disordered photonic structures and random media based devices.
机译:激光散斑图是由于随机相干小波干涉而形成的颗粒结构,通常被认为是包括光刻在内的光学系统中的噪声。与此相反,在本文中,我们使用斑点图案通过光刻技术生成可预测和受控的高斯随机结构和准随机结构。基于散斑统计,径向分布函数(RDF)和快速傅立叶变换(FFT),可以量化使用这种散斑光刻技术制成的随机结构。对斑点大小,密度和斑点簇的控制有助于成功制造具有不同表面结构的黑硅。随机性的可控制性和可调性使该技术成为制造可预测的2D高斯随机结构和黑硅结构的可靠方法。这些结构可以显着增强太阳能电池中的光捕获,因此可以改善能量收集。此外,该技术可以实现无序光子结构和基于随机介质的设备的有效制造。

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