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The integration of graphene into microelectronic devices

机译:将石墨烯集成到微电子设备中

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摘要

Since 2004 the field of graphene research has attracted increasing interest worldwide. Especially the integration of graphene into microelectronic devices has the potential for numerous applications. Therefore, we summarize the current knowledge on this aspect. Surveys show that considerable progress was made in the field of graphene synthesis. However, the central issue consists of the availability of techniques suitable for production for the deposition of graphene on dielectric substrates. Besides, the encapsulation of graphene for further processing while maintaining its properties poses a challenge. Regarding the graphene/metal contact intensive research was done and recently substantial advancements were made towards contact resistances applicable for electronic devices. Generally speaking the crucial issues for graphene integration are identified today and the corresponding research tasks can be clearly defined.
机译:自2004年以来,石墨烯研究领域在全世界引起了越来越多的兴趣。尤其是将石墨烯集成到微电子器件中具有潜在的众多应用。因此,我们总结了有关这方面的最新知识。调查表明,在石墨烯合成领域取得了长足的进步。然而,中心问题在于适用于在介电基板上沉积石墨烯的生产技术的可用性。此外,将石墨烯包封以用于进一步处理同时保持其性能提出了挑战。关于石墨烯/金属接触的深入研究,最近在适用于电子设备的接触电阻方面取得了实质性进展。一般来说,今天已经确定了石墨烯集成的关键问题,并且可以明确定义相应的研究任务。

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