Permeation-tube moisture generators are used in industry as calibrated sources of water vapor and carrier gas mixtures. Measurements were made using three permeation-tube moisture generators of the type used in the semiconductor industry. This paper describes repeatability and reproducibility standard deviations in measurement of moisture concentration from such generators. Repeatability refers to measurements within a system and reproducibility refers to measurements between systems. Two independent methods were used to measure the realized concentration of water vapor. The first measurement, the calculated value, was determined using calibrated permeation rate of permeation-tube and flow rate of dry carrier gas. This is the industrial method of evaluating moisture concentration. The second measurement, the measured value, was determined using the low frost-point generator at the National Institute of Standards and Technology (NIST) and a quartz-crystal-micro-balance. Four pairs of independent measurements for each generator and for six nominal levels in the range from10 nL/L to 100 nL/L were made. The characteristic used to quantify repeatability and reproducibility standard deviations in industrial measurements is the calculated value minus the measured value. Repeatability standard deviation ranges from 1 nL/L to 2 nL/L, approximately. Reproducibility standard deviation ranges from 2 nL/L to 8 nL/L, approximately. The documentary ASTM standard E691-99 was used for both data validation and quantification of the repeatability and reproducibility standard deviations.
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