Hard X-Ray Microscope With Submicrometer Spatial Resolution

摘要

A high-resolution hard x-ray microscope is described. This system is capable of detecting line features as small as 0.6 µm in width, and resolving line pairs 1.2-µm wide and 1.2-µm apart. Three types of two-dimensional image detectors are discussed and compared for use with hard x rays in high resolution. Principles of x-ray image magnification are discussed based on x-ray optics and diffraction physics. Examples of applications are shown in microradiography with fiber reinforced composite materials (SiC in Ti3Al Nb) and in diffraction imaging (topography) with device patterns on a silicon single crystal. High-resolution tomography has now become a reality.