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A Four-Quadrant PVDF Transducer for Surface Acoustic Wave Detection

机译:用于表面声波检测的四象限PVDF传感器

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摘要

In this paper, a polyvinylidene fluoride (PVDF) piezoelectric transducer was developed to detect laser-induced surface acoustic waves in a SiO2-thin film–Si-substrate structure. In order to solve the problems related to, firstly, the position of the probe, and secondly, the fact that signals at different points cannot be detected simultaneously during the detection process, a four-quadrant surface acoustic wave PVDF transducer was designed and constructed for the purpose of detecting surface acoustic waves excited by a pulse laser line source. The experimental results of the four-quadrant piezoelectric detection in comparison with the commercial nanoindentation technology were consistent, the relative error is 0.56%, and the system eliminates the piezoelectric surface wave detection direction deviation errors, improves the accuracy of the testing system by 1.30%, achieving the acquisition at the same time at different testing positions of the sample.
机译:在本文中,开发了一种聚偏二氟乙烯(PVDF)压电换能器,以检测SiO2薄膜-Si-衬底结构中激光诱导的表面声​​波。为了解决与探头的位置有关的问题,其次,在检测过程中不能同时检测到不同点的信号,设计并构造了一种四象限声表面波PVDF换能器。目的是检测由脉冲激光线源激发的表面声波。与商用纳米压痕技术相比,四象限压电检测的实验结果是一致的,相对误差为0.56%,系统消除了压电表面波检测方向偏差,使测试系统的精度提高了1.30%。 ,可同时在样品的不同测试位置进行采集。

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