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High-resolution reconfigurable printing of liquid metals with three-dimensional structures

机译:具有三维结构的高分辨率可重构印刷液态金属

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摘要

We report an unconventional approach for high-resolution, reconfigurable 3D printing using liquid metals for stretchable, 3D integrations. A minimum line width of 1.9 μm can be reliably formed using direct printing, and printed patterns can be reconfigured into diverse 3D structures with maintaining pristine resolutions. This reconfiguration can be performed multiple times, and it also generates a thin oxide interface that can be effective in preventing the spontaneous penetration of gallium atoms into different metal layers while preserving electrical properties under ambient conditions. Moreover, these free-standing features can be encapsulated with stretchable, conformal passivations. We demonstrate applications in the form of a reconfigurable antenna, which is tunable by changing geometeries, and reversibly movable interconnections used as mechanical switches. The free-standing 3D structure of electrodes is also advantageous for minimizing the number and space between interconnections, which is important for achieving higher integrations, as demonstrated in an array of microLEDs.
机译:我们报告了使用液态金属进行可拉伸3D集成的高分辨率,可重新配置3D打印的非常规方法。可以使用直接打印可靠地形成1.9μm的最小线宽,并且可以在保持原始分辨率的情况下将打印的图案重新配置为各种3D结构。该重新配置可以执行多次,并且还生成薄的氧化物界面,该界面可以有效防止镓原子自发渗透到不同的金属层中,同时在环境条件下保持电性能。而且,这些独立的特征可以用可拉伸的共形钝化剂封装。我们以可重构天线的形式演示了应用,该天线可通过改变几何形状以及用作机械开关的可逆移动互连来进行调整。电极的独立式3D结构也有利于最小化互连之间的数量和空间,这对于实现更高的集成度至关重要,如microLED阵列所示。

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