Wet-Chemical Synthesis of 3D Stacked Thin Film Metal-Oxides for All-Solid-State Li-Ion Batteries

摘要

By ultrasonic spray deposition of precursors, conformal deposition on 3D surfaces of tungsten oxide (WO3) negative electrode and amorphous lithium lanthanum titanium oxide (LLT) solid-electrolyte has been achieved as well as an all-solid-state half-cell. Electrochemical activity was achieved of the WO3 layers, annealed at temperatures of 500 °C. Galvanostatic measurements show a volumetric capacity (415 mAh·cm⁻³) of the deposited electrode material. In addition, electrochemical activity was shown for half-cells, created by coating WO3 with LLT as the solid-state electrolyte. The electron blocking properties of the LLT solid-electrolyte was shown by ferrocene reduction. 3D depositions were done on various micro-sized Si template structures, showing fully covering coatings of both WO3 and LLT. Finally, the thermal budget required for WO3 layer deposition was minimized, which enabled attaining active WO3 on 3D TiN/Si micro-cylinders. A 2.6-fold capacity increase for the 3D-structured WO3 was shown, with the same current density per coated area.