分段扫描在 VG9000型辉光放电质谱中的应用

摘要

The impurity elements in high -purity samples was determined by segmented scan under different pre -sputter times and different mass resolution by using GDMS VG9000.This method can effec-tively shorten the measurement time of the sample and to improve the accuracy of measurement results.%采用 VG9000型辉光放电质谱（GDMS）测定样品时，在不同预溅射时间和不同质量分辨率的情况下，对高纯样品中的杂质元素进行分段扫描测定。本法可有效的缩短样品的测定时间及提高测定结果的准确性。