传感器薄膜结构的改进与响应时间的分析

摘要

A new film structure model of gas sensor with three-dimensional sensitive effect is provided, which is improving the traditional planar structure of uniform thickness to the new sensitive three-dimensional structure with more half-cylinder uplifts and more grooves. According to the proliferation response theory, the film sensor response times of both new and traditional structure sensor are analyzed and compared. This proves that the response time of the sensor with the new sensitive structure is short. And the influence of the half-cylinder bulges spacing relative coefficient on the sensor response time is analyzed, the best value is obtained.%提出了一种具有立体敏感效应的新型气体传感器敏感薄膜结构模型,即将传统的厚度均匀的平面型传感器敏感薄膜改进为由多条半圆柱凸起与多条沟槽相间隔的立体敏感结构.并根据扩散反应理论对新型和传统型2种薄膜结构的传感器响应时间进行了分析与比较,证明新型敏感结构的传感器具有更短的响应时间;分析了半圆柱凸起间距的相对系数对传感器响应时间的影响,得出了最佳取值.