微尺度射流流量计的设计与仿真研究

摘要

A feedback-driven microscale fluidic flowmeter is designed for the need of the miniaturization of flow sensors in the MEMS flow control system. Numerical simulation method is employed to study the measurement characteristics of this microscale fluidic flowmeter. The simulation results using CFD software show that this micro scale fluidic flowmeter is able to oscillate within a very short time, oscillation is stable,switch is sensitive and the Strouhal number is almost a constant in a wide range of the inlet velocity of this flowmeter, especially the initial oscillation velocity is down to a small flow rate 0. 075 m/s. The attempt in this work may provide some useful information for design and optimization of the microscale fluidic flowmeter.%MEMS流量控制系统中,需要微型化的流量传感器,设计了一种反馈流驱动的微尺度射流流量计.采用数值模拟的方法对微尺度射流流量计进行研究,CFD软件的仿真结果表明:在较宽入口速度范围内该微尺度射流流量计起振快,振荡稳定,切换灵敏,斯特劳哈尔数基本恒定,并且流速测量下限可以达到0.075 m/s,在一定程度上为射流流量计的微型化和微尺度射流流量计的设计与优化提供了依据.