LTCC高温压力传感器的设计制作和测试

摘要

A wireless capacitive pressure sensor based on low temperature co-fired ceramic(LTCC) is presented and design, fabrication, and measurement of the sensor are discussed. Different from traditional LTCC process, C film is introduced as sacrifice layer to fill up built-in cavity of sensor structure and so as to avoid deformation of the embedded cavity during lamination and sintering. The sensor performances good sensitivity in test, compared with precious international research level. Optimization and improvement direction of current structure are proposed.%提出了一种基于低温共烧陶瓷(LTCC)的无线电容式压力传感器,并具体讨论了传感器的设计、制作以及测试.与传统的LTCC工艺所不同的是,引入了碳膜作为牺牲层来填充传感器结构的内置式空腔,可以有效地防止空腔在层压和烧结时的变形.测试中传感器表现出了良好的灵敏度,高于之前国际上的研究水平.同时给出了现有结构优化改进的方向.