高灵敏度SCR微悬臂梁设计仿真

摘要

nite element simulation method is used to simulate the effect of different characteristics of the stress concentration regions (SCR) on the measure performance of the micro-cantilever. The accepting or rejecting rule of the sensitivity and bandwidth and range of measurement are analyzed, the variation rule of measurement performance after the introduction of different formal features of SCR is given. It has some guiding significance to design and the optimization of the micro-cantilever-based microsensor and actuator.%利用有限元仿真分析方法,模拟不同特征应力集中区域(SCR)对微悬臂梁测量性能的影响,得出微悬臂梁结构引入不同形式特征SCR后所产生的测量性能的变化规律,分析灵敏度与测量带宽及测量范围的取舍原则.对基于微悬臂梁的高灵敏度微传感器、制动器的设计与优化具有一定指导意义.