静电-非线性梁耦合问题的Galerkin谱方法求解

摘要

An undamped mode of pre-stressed straight beam was used as spectral function of Galerkin mapping to solve the dynamic problem for electrostatic - nonlinear beam coupling. The dynamic process of Pull-in and Pull-off for device was simulated. The proposed model was validated by comparing with the finite element results and the literature results. It was indicated that the proposed model not only had fast simulation ability with different action loads, but also suit for fast predicting the device characters variation with the different geometry size and different material parameters. The calculating results had sufficient accuracy and the computational costs were significantly reduced.%以受预应力直梁无阻尼模态作为Galerkin映射的谱函数,求解静电-非线性梁耦合微器件的动力学问题.对器件的Pull-in吸合和释放动态过程进行仿真,将结果与有限元结果和已有文献的结果比较来验证模型的有效性,研究表明:用这一方法建立的模型不仅能够对不同载荷情况进行多次快速仿真,也能够对不同几何参数和材料参数的同类型器件进行快速计算,仿真精度高且减少了计算费用.