小角X射线衍射技术在TiAlN涂层中的应用

摘要

主要采用常规X射线衍射法(XRD)和小角X射线衍射法对微米级厚度的Ti0.5Al0.5N涂层分别进行了物相检测、晶格常数计算和残余应力测定,并对测量结果进行了比较.结果表明:常规XRD法得到的图谱中基体信息强,而小角XRD法排除了基体衍射峰的干扰,更好地反映出TiAlN涂层信息；与常规XRD相比,小角XRD技术能显著降低晶格常数测量误差,有效测定TiAlN涂层的残余应力值.%The methods of traditional X-ray diffraction (XRD) and grazing incident X-ray diffraction were used to characterize the phase assembly, lattice parameter and residual stress of Ti0.5-Al0.5 N coating with micro grade thickness. Results showed that the diffraction peaks of substrate was much stronger than those of coating in the XRD pattern obtained by traditional XRD technique, whereas more information about the coating was reflected by means of grazing incident XRD technique. Comparing with traditional XRD, grazing incident XRD technique greatly improved the measurement accuracy of lattice parameter and effectively measured the residual stress of TiAIN coating.