用于微米尺寸检测技术的涡流测量装置

摘要

According to skin effect of high-frequency eddy current, we have designed the Eddy System of Untouched Testing in multichannels for Micrometer Range. This article briefly discusses the components, the technology theory, the results of experimental measurement of achievement the error of less than 2 microns. Thus demonstrating that the system meets the online testing requirements of precision parts, in fully automated production line and that has broad application prospects .%根据高频涡流原理的集肤效应，研制出非接触式多通道微米尺寸测量系统。本文论述系统的组成、技术的原理、实验的测试结果，并得到小于2μm的误差结果，从而说明该系统满足精密零件的在线筛选检测的要求，在全自动生产线上有广阔的应用前景。