Extreme ultraviolet radiation for coherent diffractive imaging with high spatial resolution

摘要

Using different noble gases,argon,neon and helium,we are able to generate by high-harmonic generation(HHG) just a few harmonic orders in the spectral range 10-35 nm with a photon flux of～2.10 12 photons/(harmonic cm2 s) for argon and～10 10 photons/(harmonic cm2 s) for helium. The few-harmonic-order radiation is used for coherent diffractive imaging directly without any spectral filter. A spatial resolution of～100 nm is achieved using a～30 nm HHG source.