硬质薄膜耐磨性的凹坑磨损法

摘要

薄膜镀层由于厚度小，难以用通常的磨损方法评估其耐磨性。本文研究了采用精密凹坑研磨仪评价薄膜镀层耐磨性的方法，并对TaN/NbN纳米多层膜和TaN、NbN单层膜进行了磨损实验。结果表明，精密凹坑研磨仪是-种适用于评价薄膜镀层耐磨性的方法。TaN/NbN纳米多层膜有比TaN、TbN单层膜更高的耐磨性。%The antiwear properties of thin film coatings are difficult to be evaluated by ordinary method becausethe coatings are too thin in thickness. A precise dimple-grinding method was introduced and discussed and theantiwear properties of TaN/NbN nano-multilayer film, TaN and NhN single layer films were evaluated by thisnew method. The results show that the precise dimple-grinding method is a proper method to evaluate the antiwear properties of thin film coatings. TaN/NbN nano-multilayer film shows a better antiwear property thanTaN and NbN single layers.