电子工厂化学品供应与回收系统概述

摘要

This paper introduced the type, basic structure and main safety technical measures of chemical supply and recovery systems in the electronics factory which produce new display devices, IC chips. This paper can be referenced available for system optimization.%　　本文主要介绍了生产新型显示器件、集成电路芯片等电子工厂中的化学品供应及回收系统的类型、基本构成、主要安全技术措施等，可供系统优化时参考。