Characteristics of Collision,Capacitive Radio Frequency Sheath

摘要

A simple collisional radio frequency (rf) sheath fluid model, which is not restricted by the ratio of rf frequency to ion plasma frequency (β=ωrf/ωpi), was established and solved numerically. In the ion balance equation, the effect of the collision on the ion and the ion velocity is assumed to be a direct ratio to ion velocity. The ion energy distributions (IEDs) calculated in the model in comparison with the experimental data [M. A. Sobolewski, J. K. Olthoff, and Y.C. Wang, J. Appl. Phys. 85, 3966 (1999)], proved the validity of the model. And the effect of the collision on the sheath characteristic was obtained and discussed. This paper demonstrates that the collision frequency is another crucial parameter as well as the ratio β to determine the rf sheath characteristics and the shape of IE Ds.