Collisional Sheath in the Electronegative Radio-Frequency Plasma

摘要

A model of collisional RF sheath with negative ions is discussed in this paper.The influences of collision and negative ions on the parameters of the sheath are studied through numerical simulation.It is found that when the collision coefficient increases and the RF power is fixed,the electrode potential and sheath electric field potential increase,the electrode current and thickness of the sheath decrease.When the negative ion content changes,the same phenomenon occurs.