微尺度单晶碎屑θ单动XRD分析

摘要

This article is about the θ scan XRD experiment of not-sufficient grinded silicon crystal debris, which exhibits a irregular diffraction image. According to the SEM scan images and theoretical analysis, we draw a qualitative explanation as following. The scale of debris is larger than normal crystal powder and the non-uniform micro-orientation makes the dramatic change of diffraction intensity in different θ angle.%对研磨不充分的硅单晶碎屑进行θ单动XRD实验，得到无规的衍射图像。根据碎屑的SEM扫描图像和进一步模型分析，给实验结果定性解释：碎屑颗粒较大且大小不均匀导致的微取向不均匀，使得衍射强度随θ角度变化剧烈。