Micro-structures 3-D profile measurement is an important measurement content for research on micro-machining and characterization of micro-dimension. In this paper,a new method involved 2-D structure template, which guides phase unwrapping,is proposed based on phase-shifting microscopic interferometry.It is fit not only for static measurement, but also for dynamic measurement,especially for motion of MEMS devices.3-D profile of active comb of micro-resonator is obtained by using the method.The theoretic precision in out-of-plane direction is better than 0.5 nm.The in-plane theoretic precision in micro-structures is better than 0.5 μm.But at the edge of micro-structures,it is on the level of micrometer mainly caused by imprecise edge analysis.Finally,its disadvantages and the following development are discussed.
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