We proposed a called“nano-fabrication based on MEMS technology”approach to realize the typical nano-electro- mechanical structures,such as integrated nano probe,ultrathin cantilever,silicon nano wire,and doubly clamped nano beam, to demonstrate the feasibility and advantages.We also introduced the characterization of nano structures based on laser vibrometer and piezoresistive effect,the latter method was first time applied to investigate a doubly daped nanobeam with a thickness of about 200 nm.
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机译:Stratigraphic characterization of ancient Roman frescos by laser induced breakdown spectroscopy and importance of a proper choice of the normalizing lines
机译:Synthesis and Characterization of L-Lysin Coated Iron Oxide Nanoparticles as Appropriate Choices for Cell Immobilization and Magnetic Separation | Bentham Science.
机译:Fabrication and characterization of organic photovoltaic devices using surface functionalized carbon nanotubes and vertically aligned poly(3-hexylthiophene) nanobrushes.