A carbon nanotube-based sensing element

摘要

A carbon nanotube-based(CNT) sensing element is presented, which consists of substrate, insulating layer, electrodes, carbon nanotube and measuring circuit. The sensing components are a single or array of CNTs, which are located on the two electrodes. The CNT-based sensing element is fabricated by CVD (chemical vapor deposition)-direct-growth on micro- electrodes. The sensing model and measurement method of electromechanical property are also presented. Finally, the voltage-current characteristics are measured, which show that the CNT-based sensing element has good electrical properties.