Through analyzing the SPR reflected light intensity curve of first metal film, the two peak points on the curve are used to mark angle, and the cylindrical light and CCD are utilized to establish measurement system of reflected light intensity of angle distribution without mechanical turntable. The information between light intensity and pixel position detected by CCD is calculated to get the curve of reflected light intensity of angle distribution by computer, and the thickness of film can be obtained through matching the curve data of database. The films of common metal as Cr, Ti, Al and Ag are used to online measure by utilizing this measurement system, and the coating sequence and the corresponding online measurement range of nanometer metal films can be obtained.%通过对于首层金属膜的SPR反射光强曲线的分析利用两峰值点标记角度,同时用柱面光与CCD测量系统建立无机械测角转台的反射光强角度分布测量系统.根据CCD接收的光强与位置对应信息经计算机处理换算为光强角度分布曲线,并通过与库内的曲线数据进行匹配而获得膜厚数值.利用该系统对铬钛银铝等常用金属薄膜进行了在线测控研究,得到了纳米级金属薄膜的膜层蒸镀顺序与相应的膜厚测量范围.
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