高速旋转平面反射镜镜面变形测量

摘要

A method of deformation measurement is introduced for a rotating plane reflective mirror with high speed. Since the inertia moment is added by mirror rotating, a bend deflection will appear on the body of plane reflective mirror, which will influence the quality of laser beam capture. With regards to this, strains are measured in the mirror body by strain gauges, and the signals are transferred for data acquisition through a slip ring. Based on the relationship between deformation and strain, the corresponding equivalent thickness of mirror body can be estimated by simulation, and the deformation of mirror body can be reconstructed by digital integration. Compared with the finite element calculation results, the correctness of the measurement is verified. Research experiment shows that the proposed method is successful in the result of measurement, and it gives new clue of the deformation estimation of rotating mirror.%　　本文将介绍高速旋转平面反射镜镜面变形测量。平面反射镜在高速旋转时由于镜体倾斜引起的惯性力矩会使镜体产生弯曲变形，影响成像质量。利用应变电测法，通过导电滑环把镜体旋转时镜面应变片电阻变化信号连接到应变仪。从变形与应变之间的关系，用仿真方法估计镜体等效厚度，数值积分重构镜体弯曲变形。并与有限元计算结果进行对比，验证测量的正确性。研究表明：该方法有效可行，为旋转镜面变形测量提供一种新的思路。