60kV离子源引出与加速系统的数值模拟

摘要

对60kV、70A、2s离子源的四电极引出-加速系统进行了数值模拟。利用数值计算结果对系统进行了优化。在离子流密度为0.24A*cm－2（束中H＋１∶H＋２∶H＋３＝0．7∶0．2∶0．1)和离子源等离子体离子温度为1eV时，由系统栅缝出射的束最大散角小于1o。%Numerical simulation has been done on the tetrode extraction-acceleration system for an ion source with 60kV,70A and 2s.The system was optimized according to the calculation results.The maximum divergence angle of the beam is less than 1o when the ion current density is rn0.24A*cm-2 (H＋１∶H＋２∶H＋３＝0．7∶0．2∶0．1　in the beam) and the ion temperature of the ion source plasma is 1eV.